Summer School on Computational Materials Science
2002
University of Illinois, Urbana-Champaign

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Microelectromechanical Sistems (MEMS) and Advanced MicroFabrication 

 

Mark Shannon - mas1@uiuc.edu

Department of Mechanical and Industrial Engineering

University of Illinois at Urbana-Champaign

Outline of Lecture

  1. MEMS and Advanced MicroFabrication
    1. Introduction
    2. Silicon die (chip) fabrication
    3. State of art etching
    4. Inductively coupled plasma
    5. Deep reative ion etching
    6. Research challenges
    7. High aspect ratio structures
    8. Membrane transfer
    9. Thermal adhesive bonding
    10. Wafer bonding
    11. Wafer scale processing
    12. Microfabricated layered systems

 
   

Lecture 1

MEMS and Advanced MicroFabrication
  Presentation - download (1.86 MB PDF)

 

Last Updated August 22, 2002
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