Summer School on Computational Materials Science
2002
University of Illinois, Urbana-Champaign

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System-Level Modeling and Design of Integrated MEMS

Tamal Mukherjee - tamal@ece.cmu.edu

MEMS Laboratory, Department of Electrical and Computer Engineering

Carnegie-Mellon University


Outline of Lecture

  1. System-Level Modeling and Design of Integrated MEMS
    1. MEMS Design Issues
    2. Process and Design Abstractions
    3. MEMS Circuit Level Modeling and Simulation
    4. Layout Generation
    5. Layout Verification
    6. Mesh Generation
    7. Synthesis
    8. Summary

Comprehensive Reading List

download (147 KB PDF)

   

Lecture 1

System-Level Modeling and Design of Integrated MEMS
  Presentation - download (3.3 MB PDF)

 


Last Updated August 20, 2002
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