Summer School on Computational Materials Science
2002
University of Illinois, Urbana-Champaign

Back to Summer School 2002

Computational Methods for MEMS

Narayan Aluru - aluru@uiuc.edu

Department of General Engineering, Beckman Institute and Computational Science and Engineering Program

University of Illinois at Urbana-Champaign

Outline of Lecture

  1. Computational Methods for MEMS
    1. MEMS Examples
    2. Mixed-Domain Simulation of electrostatic MEMS and microfluidics
    3. Techniques for interior problems 
    4. Finite Elements Method (FEM)
    5. Heat Conduction
    6. Elastostatics
    7. Elastodynamics
    8. Newton method for non-linear systems
    9. Techniques for exterior problems
    10. Boundary Elements Method
    11. Boundary Integral formulation
    12. Fast integral equation solver
    13. Coupled Electromechanical Analysis
    14. Microfluidics: Gas flow
    15. Gas flow in microchannels
   

Lecture 1

Computational Methods for MEMS
  Presentation - download (1.17 MB PDF)

 

Last Updated August 20, 2002
Report errors to the webmaster